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Nanoelectromechanical Systems

Roukes, M. L. (2000) Nanoelectromechanical Systems. In: Technical Digest of the 2000 Solid-State Sensor and Actuator Workshop. Transducers Research Foundation, Inc. , Cleveland Heights, OH, pp. 367-376. ISBN 9780964002432.

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Nanoelectromechanical systems, or NEMS, are MEMS scaled to submicron dimensions [1]. In this size regime, it is possible to attain extremely high fundamental frequencies while simultaneously preserving very high mechanical responsivity (small force constants). This powerful combination of attributes translates directly into high force sensitivity, operability at ultralow power, and the ability to induce usable nonlinearity with quite modest control forces. In this overview I shall provide an introduction to NEMS and will outline several of their exciting initial applications. However, a stiff entry fee exists at the threshold to this new domain: new engineering is crucial to realizing the full potential of NEMS. Certain mainstays in the methodology of MEMS will, simply, not scale usefully into the regime of NEMS. The most problematic of issues are the size of the devices compared to their embedding circuitry, their extreme surface-to-volume ratios, and their unconventional “characteristic range of operation”. These give rise to some of the principal current challenges in developing NEMS. Most prominent among these are the need for: ultrasensitive, very high bandwidth displacement transducers; an unprecedented control of surface quality and adsorbates; novel modes of efficient actuation at the nanoscale, and precise, robust, and routinely reproducible new approaches to surface and bulk nanomachining. In what follows I shall attempt to survey each of these aspects in turn, but will conclude by describing some exciting prospects in this new field.

Item Type:Book Section
Roukes, M. L.0000-0002-2916-6026
Additional Information:© 2000 Transducers Research Foundation, Inc. It is a pleasure to acknowledge the extremely talented individuals - the current and former members of my group, and my collaborators and colleagues - who have contributed immensely to these efforts and ideas. I regret that it is not possible to list everyone here; a small portion of their contributions is reflected in the references and figures. I gratefully acknowledge support from DARPA MTO/MEMS that has made our efforts possible – I especially thank the three program managers I have been privileged to work with: Dr. K. Gabriel, Prof. A. Pisano, and Dr. W. Tang. Their strong personal encouragement has been crucial. I thank Dr. Kamil Ekinci and Darrell Harrington for their comments on this manuscript; I must take all responsibility, however, for any errors overlooked.
Funding AgencyGrant Number
Defense Advanced Research Projects Agency (DARPA)UNSPECIFIED
Subject Keywords:solid-state sensor, TRF, transducers research, actuator
Record Number:CaltechAUTHORS:20190702-103527733
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Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:96881
Deposited By: Tony Diaz
Deposited On:02 Jul 2019 19:18
Last Modified:03 Oct 2019 21:26

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