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Effects of Target Compliance on a High-Speed Droplet Impact

Sanada, Toshiyuki and Ando, Keita and Colonius, Tim (2012) Effects of Target Compliance on a High-Speed Droplet Impact. In: Ultra Clean Processing of Semiconductor Surfaces X. Solid State Phenomena. No.187. Trans Tech Publications , Switzerland, pp. 137-140. ISBN 9783037853887. https://resolver.caltech.edu/CaltechAUTHORS:20190712-112320367

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Abstract

High speed spray cleaning which utilize droplets impact has been used for removing contaminants from wafer surface. When a droplet impacts a solid surface at high speed, the contact periphery expands very quickly and liquid compressibility plays an important role in the initial dynamics and the formation of lateral jets. Impact results in high pressures that can clean or damage the surface. In this study, we numerically investigated a high speed droplet impacts on a solid wall. In order to compare the available theory and experiments, 1 D, 2D and axisymmetric solutions are obtained. The generated pressures, shock speeds, and the lateral jetting mechanism are investigated; especially the effect of target compliance is focused.


Item Type:Book Section
Related URLs:
URLURL TypeDescription
https://doi.org/10.4028/www.scientific.net/SSP.187.137DOIArticle
https://www.scientific.net/SSP.187.137PublisherArticle
ORCID:
AuthorORCID
Colonius, Tim0000-0003-0326-3909
Additional Information:© 2012 Trans Tech Publications. Online since: April 2012.
Subject Keywords:High-Speed Droplet Impact, Numerical Simulation, Side Jet, Target Compliance
Series Name:Solid State Phenomena
Issue or Number:187
Record Number:CaltechAUTHORS:20190712-112320367
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20190712-112320367
Official Citation:T. Sanada et al., "Effects of Target Compliance on a High-Speed Droplet Impact", Solid State Phenomena, Vol. 187, pp. 137-140, 2012
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:97096
Collection:CaltechAUTHORS
Deposited By: Melissa Ray
Deposited On:12 Jul 2019 23:03
Last Modified:03 Oct 2019 21:28

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