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Evolution of rivulets during spreading of an impinging water jet on a rotating, precoated substrate

Ylitalo, Andrew S. and Walls, Daniel J. and Mui, David S. L. and Frostad, John M. and Fuller, Gerald G. (2019) Evolution of rivulets during spreading of an impinging water jet on a rotating, precoated substrate. Physics of Fluids, 31 (8). Art. No. 082104. ISSN 1070-6631. https://resolver.caltech.edu/CaltechAUTHORS:20190807-092151671

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Abstract

The spreading of a liquid film across a rotating surface is inherently unstable due to the centrifugal force, which causes the formation of rivulets along the spreading front. This instability produces a rich diversity of spreading patterns and is important to control for the optimization of spin-coating and spin-rinsing of silicon wafers during the fabrication of microelectronics. The present work is an experimental investigation of the evolution of rivulets arising from this instability during the spreading of an impinging water jet across a rotating substrate that is precoated with a thin, aqueous film. To characterize these rivulets, we developed a high-speed imaging apparatus and image-processing software that traces the spreading front over time. We show how the morphology of the spreading front is qualitatively affected by varying the Reynolds number of the impinging jet, the ratio of centrifugal to Coriolis forces, and the type of liquid used to precoat the substrate. For quantitative analysis of rivulets, we measured the “compactness ratio” of the spreading front, which quantifies deviation from a circular spreading front. We used the compactness ratio to demonstrate that rivulets are suppressed most strongly at low rotation rates, at high flow rates, and on substrates precoated with water, although with notable exceptions.


Item Type:Article
Related URLs:
URLURL TypeDescription
https://doi.org/10.1063/1.5109806DOIArticle
ORCID:
AuthorORCID
Ylitalo, Andrew S.0000-0003-4086-3508
Walls, Daniel J.0000-0002-2744-0722
Frostad, John M.0000-0001-9259-5854
Fuller, Gerald G.0000-0002-2924-053X
Additional Information:© 2019 Published under license by AIP Publishing. Submitted: 13 May 2019; Accepted: 3 July 2019; Published Online: 7 August 2019. The authors are grateful to the Lam Research Corporation for support in the form of an unrestricted gift. The authors would also like to thank Brian Friedenberg for assistance with the image-processing software. This work was partially funded by the National Science Foundation CBET Grant Nos. 1335632 and 1435683.
Funders:
Funding AgencyGrant Number
NSFCBET-1335632
NSFCBET-1435683
Issue or Number:8
Record Number:CaltechAUTHORS:20190807-092151671
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20190807-092151671
Official Citation:Evolution of rivulets during spreading of an impinging water jet on a rotating, precoated substrate. Andrew S. Ylitalo, Daniel J. Walls, David S. L. Mui, John M. Frostad, and Gerald G. Fuller. Physics of Fluids 31:8; doi: 10.1063/1.5109806
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:97694
Collection:CaltechAUTHORS
Deposited By: Tony Diaz
Deposited On:07 Aug 2019 16:30
Last Modified:03 Aug 2020 18:58

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