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Nanoelectromechanical Systems

Roukes, Michael L. (2001) Nanoelectromechanical Systems. In: Transducers ’01 Eurosensors XV. Springer Berlin Heidelberg , Berlin, Heidelberg, pp. 658-661. ISBN 9783540421504. https://resolver.caltech.edu/CaltechAUTHORS:20190826-124739700

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Abstract

Nanoelectromechanical systems, or NEMS, are MEMS scaled to submicron dimensions [1,2,3]. In this size regime, it is possible to attain extremely high fundamental frequencies while simultaneously preserving very high mechanical responsivity (small force constants). This powerful combination of attributes translates directly into high force sensitivity, operability at ultralow power, and the ability to induce usable nonlinearity with quite modest control forces. In my presentation I shall provide an introduction to NEMS and will outline several of their exciting initial applications.


Item Type:Book Section
Related URLs:
URLURL TypeDescription
https://doi.org/10.1007/978-3-642-59497-7_156DOIArticle
ORCID:
AuthorORCID
Roukes, Michael L.0000-0002-2916-6026
Additional Information:© Springer-Verlag Berlin Heidelberg 2001.
Subject Keywords:Nanomechanical Systems; NEMS
Record Number:CaltechAUTHORS:20190826-124739700
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20190826-124739700
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:98235
Collection:CaltechAUTHORS
Deposited By: George Porter
Deposited On:26 Aug 2019 21:22
Last Modified:03 Oct 2019 21:39

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