Roukes, Michael L. (2001) Nanoelectromechanical Systems. In: Transducers ’01 Eurosensors XV. Springer Berlin Heidelberg , Berlin, Heidelberg, pp. 658-661. ISBN 9783540421504. https://resolver.caltech.edu/CaltechAUTHORS:20190826-124739700
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Abstract
Nanoelectromechanical systems, or NEMS, are MEMS scaled to submicron dimensions [1,2,3]. In this size regime, it is possible to attain extremely high fundamental frequencies while simultaneously preserving very high mechanical responsivity (small force constants). This powerful combination of attributes translates directly into high force sensitivity, operability at ultralow power, and the ability to induce usable nonlinearity with quite modest control forces. In my presentation I shall provide an introduction to NEMS and will outline several of their exciting initial applications.
| Item Type: | Book Section | |||||||||
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| Additional Information: | © Springer-Verlag Berlin Heidelberg 2001. | |||||||||
| Subject Keywords: | Nanomechanical Systems; NEMS | |||||||||
| DOI: | 10.1007/978-3-642-59497-7_156 | |||||||||
| Record Number: | CaltechAUTHORS:20190826-124739700 | |||||||||
| Persistent URL: | https://resolver.caltech.edu/CaltechAUTHORS:20190826-124739700 | |||||||||
| Usage Policy: | No commercial reproduction, distribution, display or performance rights in this work are provided. | |||||||||
| ID Code: | 98235 | |||||||||
| Collection: | CaltechAUTHORS | |||||||||
| Deposited By: | George Porter | |||||||||
| Deposited On: | 26 Aug 2019 21:22 | |||||||||
| Last Modified: | 16 Nov 2021 17:37 |
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