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Imaging Multimode Vibrations in High-Frequency Aluminum Nitride Piezoelectric Nanomembrane Resonators

Jia, Hao and Matheny, Matthew H. and Roukes, Michael L. and Feng, Philip X.-L. (2019) Imaging Multimode Vibrations in High-Frequency Aluminum Nitride Piezoelectric Nanomembrane Resonators. In: 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII). IEEE , Piscataway, NJ, pp. 442-445. ISBN 9781538681046. https://resolver.caltech.edu/CaltechAUTHORS:20190829-100210861

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Abstract

We report on the first imaging and visualization of the multimode resonant behaviors of aluminum nitride (AlN) piezoelectric nanomembrane resonators, by exploiting a spectromicroscopy technique based on scanning laser interferometry. High-frequency multimode vibrations (up to 33MHz) with quality (Q) factors up to ~8500 are observed in the AlN nanomembranes. Both undriven thermomechanical and coherently excited vibrations of the devices are measured and spatially mapped. Such a multimode AlN device platform with abundant resonant modes, two-dimensional (2D) large capturing surfaces, and efficient all-electrical signal transduction, holds strong promise for enabling ultrasensitive gravimetric detection, mass spectroscopy, and inertial imaging.


Item Type:Book Section
Related URLs:
URLURL TypeDescription
https://doi.org/10.1109/transducers.2019.8808643DOIArticle
ORCID:
AuthorORCID
Matheny, Matthew H.0000-0002-3488-1083
Roukes, Michael L.0000-0002-2916-6026
Feng, Philip X.-L.0000-0002-1083-2391
Additional Information:© 2019 IEEE. H.J. and P.X.-L.F. acknowledge support from the National Science Foundation (NSF) through SNM Grant (CMMI-1246715), EPMD Grant (ECCS-1408494), and CCSS Grant (ECCS-1509721). M.L.R. and M.H.M. gratefully acknowledge support from the U.S. Army Research Office (ARO) under Grant W911NF13-1-0240.
Group:Kavli Nanoscience Institute
Funders:
Funding AgencyGrant Number
NSFCMMI-1246715
NSFECCS-1408494
NSFECCS-1509721
Army Research Office (ARO)W911NF13-1-0240
Subject Keywords:Nanoelectromechanical systems (NEMS), aluminum nitride (AlN), resonator, nanomembrane, piezoelectric, multimode resonances, spatial mapping, mode shape
Record Number:CaltechAUTHORS:20190829-100210861
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20190829-100210861
Official Citation:H. Jia, M. H. Matheny, M. L. Roukes and P. X. -. Feng, "Imaging Multimode Vibrations in High-Frequency Aluminum Nitride Piezoelectric Nanomembrane Resonators," 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), Berlin, Germany, 2019, pp. 442-445. doi: 10.1109/TRANSDUCERS.2019.8808643
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:98333
Collection:CaltechAUTHORS
Deposited By: George Porter
Deposited On:30 Aug 2019 15:10
Last Modified:03 Oct 2019 21:40

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