Lee, Jaesung and Matheny, Matthew H. and Roukes, Michael L. and Feng, Philip X.-L. (2019) AlN Piezoelectric Nanoelectromechanical Isolator via Parametric Frequency Conversion and Amplification. In: 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS). IEEE , Piscataway, NJ, pp. 879-882. ISBN 9781728116105. https://resolver.caltech.edu/CaltechAUTHORS:20191025-124827590
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Abstract
We report on a novel aluminum nitride (AlN) resonant nanoelectromechanical systems (NEMS) approach to realizing an electrically tunable nonreciprocal isolator by exploiting nonlinear parametric frequency conversion and efficient mechanical amplification in a radio-frequency (RF) AlN membrane NEMS resonator. The isolator is constructed by combining frequency conversion enabled by the NEMS resonator's strong parametric effect, and tandem band-pass filtering, so that the signal can be transmitted or blocked according to its propagation direction and frequency. In the band of the isolator that is set by the NEMS resonance, it exhibits up to ∼60dB signal isolation between measured S₂₁ and S₁₂ transmission. Further, the isolation band frequency and width can be tuned via a dc polarization voltage.
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| Additional Information: | © 2019 IEEE. We thank the support from the Army Research Office (ARO, Grant W911NF1610340). We thank Dr. Jia Hao for useful discussions. M.H.M. and M.L.R. thank the support from ARO (Grant W911NF13-1-0240). We thank CEA-Leti (Grenoble, France) for the piezoelectric multilayers. We also thank the important support and infrastructure from the Kavli Nanoscience Institute (KNI) at Caltech. | ||||||||
| Group: | Kavli Nanoscience Institute | ||||||||
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| Subject Keywords: | Resonant frequency, Nanoelectromechanical systems, Frequency conversion, Frequency measurement, Aluminum nitride, III-V semiconductor materials, Band-pass filters | ||||||||
| DOI: | 10.1109/memsys.2019.8870624 | ||||||||
| Record Number: | CaltechAUTHORS:20191025-124827590 | ||||||||
| Persistent URL: | https://resolver.caltech.edu/CaltechAUTHORS:20191025-124827590 | ||||||||
| Official Citation: | J. Lee, M. H. Matheny, M. L. Roukes and P. X. -. Feng, "AlN Piezoelectric Nanoelectromechanical Isolator via Parametric Frequency Conversion and Amplification," 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS), Seoul, Korea (South), 2019, pp. 879-882. doi: 10.1109/MEMSYS.2019.8870624 | ||||||||
| Usage Policy: | No commercial reproduction, distribution, display or performance rights in this work are provided. | ||||||||
| ID Code: | 99454 | ||||||||
| Collection: | CaltechAUTHORS | ||||||||
| Deposited By: | George Porter | ||||||||
| Deposited On: | 25 Oct 2019 20:25 | ||||||||
| Last Modified: | 16 Nov 2021 17:46 |
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