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AlN Piezoelectric Nanoelectromechanical Isolator via Parametric Frequency Conversion and Amplification

Lee, Jaesung and Matheny, Matthew H. and Roukes, Michael L. and Feng, Philip X.-L. (2019) AlN Piezoelectric Nanoelectromechanical Isolator via Parametric Frequency Conversion and Amplification. In: 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS). IEEE , Piscataway, NJ, pp. 879-882. ISBN 9781728116105. https://resolver.caltech.edu/CaltechAUTHORS:20191025-124827590

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Abstract

We report on a novel aluminum nitride (AlN) resonant nanoelectromechanical systems (NEMS) approach to realizing an electrically tunable nonreciprocal isolator by exploiting nonlinear parametric frequency conversion and efficient mechanical amplification in a radio-frequency (RF) AlN membrane NEMS resonator. The isolator is constructed by combining frequency conversion enabled by the NEMS resonator's strong parametric effect, and tandem band-pass filtering, so that the signal can be transmitted or blocked according to its propagation direction and frequency. In the band of the isolator that is set by the NEMS resonance, it exhibits up to ∼60dB signal isolation between measured S₂₁ and S₁₂ transmission. Further, the isolation band frequency and width can be tuned via a dc polarization voltage.


Item Type:Book Section
Related URLs:
URLURL TypeDescription
https://doi.org/10.1109/memsys.2019.8870624DOIArticle
ORCID:
AuthorORCID
Matheny, Matthew H.0000-0002-3488-1083
Roukes, Michael L.0000-0002-2916-6026
Feng, Philip X.-L.0000-0002-1083-2391
Additional Information:© 2019 IEEE. We thank the support from the Army Research Office (ARO, Grant W911NF1610340). We thank Dr. Jia Hao for useful discussions. M.H.M. and M.L.R. thank the support from ARO (Grant W911NF13-1-0240). We thank CEA-Leti (Grenoble, France) for the piezoelectric multilayers. We also thank the important support and infrastructure from the Kavli Nanoscience Institute (KNI) at Caltech.
Group:Kavli Nanoscience Institute
Funders:
Funding AgencyGrant Number
Army Research Office (ARO)W911NF16-1-0340
Army Research Office (ARO)W911NF13-1-0240
Kavli Nanoscience InstituteUNSPECIFIED
Subject Keywords:Resonant frequency, Nanoelectromechanical systems, Frequency conversion, Frequency measurement, Aluminum nitride, III-V semiconductor materials, Band-pass filters
Record Number:CaltechAUTHORS:20191025-124827590
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20191025-124827590
Official Citation:J. Lee, M. H. Matheny, M. L. Roukes and P. X. -. Feng, "AlN Piezoelectric Nanoelectromechanical Isolator via Parametric Frequency Conversion and Amplification," 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS), Seoul, Korea (South), 2019, pp. 879-882. doi: 10.1109/MEMSYS.2019.8870624
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:99454
Collection:CaltechAUTHORS
Deposited By: George Porter
Deposited On:25 Oct 2019 20:25
Last Modified:25 Oct 2019 20:25

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