Parylene coated silicon probes for neural prosthesis
Silicon neural prosthetic probes require reliable sensing electrodes able to access deep cortical structures without breakage. However, manufacturing limitations have prevented a strong and biocompatible silicon electrode array from reaching this goal. We here demonstrate the first high-density, parylene-coated silicon probe (1.2 cm long) with micro-fabricated electrodes that is able to be inserted in vivo without failure. This work also presents new experimental results for array shank deflection testing, lifetime soak testing as well as the in vitro electrical characterization of the gold and platinum micro-electrodes. These results allow us to optimize the geometry and treatment for both the silicon probe and the metal electrodes.
Additional Information© 2008 IEEE. This project was funded by the Defense Advanced Research Projects Agency (DARPA) (Award # 908165) and by National Institute of Health (NIH) moveable probe project (Award # R01EY015545). The authors would also like to thank Mr. Trevor Roper, other members of the Caltech Micromachining Laboratory and Andersen lab at Caltech for their advice and help.