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Published November 1997 | Published
Journal Article Open

Surface micromachined membranes for tunnel transducers


We have developed low-temperature surface micromachining procedures for the fabrication of suspended SiO2/Si3N4 membranes. This fabrication method was integrated with electron beam lithography, anisotropic ion etching, and electroplating to construct electrostatically deflectable tunnel transducers. We show the structures and some preliminary measurements on the performance of these monolithic devices.

Additional Information

© 1997 American Vacuum Society. Received 30 May 1997; accepted 31 July 1997. This work was funded by the National Science Foundation and the Army Research Office.

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Published - WONjvstb97.pdf


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