Published December 1983
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Advances in microbolometers
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Abstract
The bismuth microbolometer is a simple, easily made detector suitable for use throughout the far-infrared. A novel photoresist fabrication procedure has made it possible to obtain an electrical NEP of 2.8×10⁻¹¹ W (Hz)^(−1/2) at 100kHz for an airbridge bolometer. By using a polyimide plastic as an insulator, conventional substrate-supported devices with an NEP of 3.2×10⁻¹¹ W(Hz)^(−1/2) have also been made.
Additional Information
© 1983 IEEE. We would like to acknowledge the support of the Department of Energy under contract DEAM03-765F-00010 Task IIA, the Army Research Office under contract DAAG29-82-K-0165,and the Jet Propulsion Laboratory through Dr. M. Litvak.Attached Files
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Additional details
Identifiers
- Eprint ID
- 106417
- Resolver ID
- CaltechAUTHORS:20201104-080419245
Funding
- Department of Energy (DOE)
- DEAM03-765F-00010
- Army Research Office (ARO)
- DAAG29-82-K-0165
- JPl
Dates
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2020-11-04Created from EPrint's datestamp field
- Updated
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2021-11-16Created from EPrint's last_modified field