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Published March 2012 | public
Book Section - Chapter

In Situ Heating to Improve Adhesion for Parylene-on-Parylene Deposition


A new technique of using "in-situ heating" to enhance adhesion for parylene-on-parylene deposition is reported in this paper. This method is compared with existing physical or chemical adhesion-enhancing methods and the results show clear advantages of this new technique. The physics is believed to be that the mobility of deposition-involved molecules (including the substrate parylene polymer chains and adsorbed monomers during deposition) is enhanced when deposition temperature rises, especially above the glass transition temperature of the substrate parylene. Each sample is patterned and then soaked in 0.9% saline at 90°C, and the undercut between two parylene layers due to the attack from saline during the soaking test could be observed. The undercut rate is measured to quantify the adhesion strength.

Additional Information

© 2012 IEEE. This work is supported by Biomimetic MicroElectronic Systems (BMES). The authors would like to thank Mr. Trevor Roper and other members of the Cal tech Micromachining Laboratory for their generous help and useful advice.

Additional details

August 22, 2023
October 23, 2023