Published September 1, 1982
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Self-heated thermocouples for far-infrared detection
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Abstract
A novel self-heated Bi-Sb thermocouple for far-infrared detection has been developed. The detector is suitable for integration with monolithic antennas and imaging arrays. The device is fabricated in a single photolithography masking step using a photoresist-bridge technique. This bridge technique has also been used to make microbolometers with lower 1/f noise than those made by two conventional masking steps. The thermocouples have a noise equivalent power (NEP) of 7×10^−10 W/(√Hz) and a 3-dB frequency response of 150 kHz.
Additional Information
© 1982 American Institute of Physics. Received 16 April 1982; accepted for publication 7 June 1982. We appreciate the support of the Jet Propulsion Laboratory and the Department of Energy under contract DeAMO3-765F-00010 Task IIA. We would like to thank Professor S.E. Schwarz for helping us with the mask making, and Professor N.C. Luhmann, Dr. W.A. Peebles, H. Park, and P.E. Young for help with the far-infrared measurements.Files
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