Published October 27, 1988
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Journal Article
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Generation of 1180 Å period gratings with a Xe ion laser
Abstract
Holographic lithography with the 2315 Å line of a xenon ion laser is used to produce gratings in polymethylmethacrylate. An 1180 Å period grating is made and examined with a scanning electron microscope (SEM). This grating period is appropriate for use as a first-order grating with a GaAs distributed feedback laser.
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Identifiers
- Eprint ID
- 737
- Resolver ID
- CaltechAUTHORS:ZARel88
Related works
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- http://ieeexplore.ieee.org/iel1/2220/2700/00082444.pdf (URL)
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2005-09-22Created from EPrint's datestamp field
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2020-03-09Created from EPrint's last_modified field