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Published 1995 | Published
Book Section - Chapter Open

Silicon Detector Studies with an Interferometric Thickness Mapper


A laser-interferometer system has been developed to precisely map the thickness variations of large-area silicon detectors. We describe the design and operation of the apparatus and the data processing carried out to derive thickness maps. We compare the results with a map made using accelerator beams of energetic heavy ions.

Additional Information

© IUPAP. Provided by the NASA Astrophysics Data System. We are grateful to R Radocinski and B. Sears for help with the data processing. The research described in this paper was supported by the National Aeronautics and Space Administration at the California Institute of Technology (under contract NAS5-32626 and grant NAGW-1919) and the Jet Propulsion Laboratory. Equipment funding was provided, in part, by the JPL Equipment and Instrumentation Committee.

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August 20, 2023
October 26, 2023