Welcome to the new version of CaltechAUTHORS. Login is currently restricted to library staff. If you notice any issues, please email coda@library.caltech.edu
Published September 1, 2008 | Published
Journal Article Open

Silver diffusion bonding and layer transfer of lithium niobate to silicon


A diffusion bonding method has been developed that enables layer transfer of single crystal lithium niobate thin films to silicon substrates. A silver film was deposited onto both the silicon and lithium niobate surfaces prior to bonding, and upon heating, a diffusion bond was formed. Transmission electron microscopy confirms the interface evolution via diffusion bonding which combines interfacial diffusion, power law creep, and growth of (111) silver grains to replace the as-bonded interface by a single polycrystalline silver film. The transferred film composition was the same as bulk lithium niobate.

Additional Information

© 2008 American Institute of Physics. Received 7 July 2008; accepted 8 August 2008; published 5 September 2008. This work was supported by the Army Research Office (ARO-MURI) under Grant No. DAAD 19-01-1-0517 and the Caltech KNI and Materials Science TEM facilities supported by the MRSEC Program of the National Science Foundation under Award No. DMR-0520565.

Attached Files

Published - DIEapl08.pdf


Files (969.7 kB)
Name Size Download all
969.7 kB Preview Download

Additional details

August 22, 2023
October 17, 2023