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Published August 6, 2001 | Published
Journal Article Open

Localized charge injection in SiO₂ films containing silicon nanocrystals


An atomic-force microscope (AFM) is used to locally inject, detect, and quantify the amount and location of charge in SiO₂ films containing Si nanocrystals (size ~2–6 nm). By comparison with control samples, charge trapping is shown to be due to nanocrystals and not ion-implantation-induced defects in samples containing ion-beam-synthesized Si nanocrystals. Using an electrostatic model and AFM images of charge we have estimated the amount of charge injected in a typical experiment to be a few hundred electrons and the discharge rate to be ~35 ± 15 e/min.

Additional Information

© 2001 American Institute of Physics. (Received 14 July 2000; accepted 14 May 2001) The research described in this letter was jointly sponsored by the National Aeronautics and Space Administration (NASA) and the Jet Propulsion Laboratory Director's Research and Development Fund, and by the National Science Foundation under Grant No. DMR 98-71850.

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