Published March 8, 1996
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Magnetically actuated MEMS scanning mirror
Abstract
A 4 mm by 5 mm, magnetically actuated scanning MEMS mirror is fabricated by integration of bulk silicon micromachining and magnetic thin film head techniques. Large mirror deflection angles (0 - 70 degree(s)) are achieved. The MEMS mirror is demonstrated as a laser beam scanner in both conventional and compact holographic data storage system configurations.
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© 1996 Society of Photo-Optical Instrumentation Engineers (SPIE).Attached Files
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Additional details
- Eprint ID
- 88274
- Resolver ID
- CaltechAUTHORS:20180725-160850964
- Created
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2018-07-30Created from EPrint's datestamp field
- Updated
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2021-11-16Created from EPrint's last_modified field
- Series Name
- Proceedings of SPIE
- Series Volume or Issue Number
- 2687