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Published January 21, 1988 | Published
Journal Article Open

Fast direct e-beam lithographic fabrication of first-order gratings for 1.3 μm DFB lasers


Phase-shifted first-order gratings for 1.3 μm distributed-feedback (DFB) lasers have been fabricated in InP by fast direct e-beam lithography. The two-layer resist system consisted of a highly sensitive (~3 μC/cm2) positive organosilicon e-beam resist, poly(3-butenyltrimethylsilane sulfone) (PBTMSS), and a bottom layer of diamond-like carbon (DLC). The high quality of these gratings was reflected in the excellent characteristics of the DFB lasers.

Additional Information

© 1988 IEE. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the IEE. We thank J. Osinski for his contribution to wet etching of InP. Close collaboration with C. E. Zah, C. Caneau, S. Menocal and F. Favire is gratefully acknowledged, as are discussions with M. J. Bowden and T. P. Lee.

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