Welcome to the new version of CaltechAUTHORS. Login is currently restricted to library staff. If you notice any issues, please email coda@library.caltech.edu
Published July 2012 | public
Book Section - Chapter

Silicon photonic components for integrated optical systems


We show that the properties of silicon can be changed profoundly when nanofabricated to below 5nm, resulting in larger bandgap emission and more efficient light generation. Moreover, three-dimensional nanostructures can be fabricated at these nanoscale dimensions by dynamic control over the dry etching process.

Additional Information

© 2012 IEEE. Support from the NSF through the CIAN is gratefully acknowledged.

Additional details

August 19, 2023
March 5, 2024