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Published February 2013 | Accepted Version
Journal Article Open

Micromachined silicon acoustic delay lines for ultrasound applications


In this paper, we present the design, fabrication and testing of novel micromachined silicon-based acoustic delay lines. The acoustic properties of different silicon delay-line structures have been characterized. Based on the experiment results, two different acoustic delay line systems (parallel and serial) have been successfully demonstrated to create controlled time delays in multiple channels of ultrasound signals. The time-delayed ultrasound signals are received with a single-element ultrasound transducer in a time-serial manner. This unique capability could be used to merge multiple signal channels, thereby enabling new ultrasound receiver designs with potentially less complexity and lower cost.

Additional Information

© 2013 IOP Publishing Ltd. Received 25 July 2012, in final form 15 November 2012; Published 21 December 2012. This work is supported in part through a grant from the National Science Foundation (CMMI-1131758) and National Institutes of Health (U54 CA136398). The authors would like to thank Dr D Voronine and K Wang from the Department of Physics for their kindly assistance on the photoacoustics setup.

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Accepted Version - nihms495670.pdf


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