Advanced Conformal Parylene Fabrication for Micro/nano Devices
Herein, we reported several advanced parylene fabrication techniques for various micro/nano devices by taking advantages of the conformal deposition capability and overcoming related restrictions when depositing in high aspect ratio structures, including deep-trench filling by Parylene C for thermal isolation in silicon microdevices, parylene molding technique for high porosity filter membrane preparation, Parylene C caulked PDMS (pcPDMS) for low permeability microfluidics applications, and ultra-thin parylene deposition for flexible electronics.
© 2015 IEEE. Date of Conference: 1-4 Nov. 2015. Date Added to IEEE Xplore: 07 January 2016.