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Published January 2000 | Published
Book Section - Chapter Open

An air-to-liquid MEMS particle sampler


In order to have a working bio-particle analysis system, a method of capturing the particles from the air into the liquid is required. Here, we report a complete MEMS system that includes an air-to-liquid MEMS interface (made of glass and PDMS) for airborne bioparticle (<10 /spl mu/m) analysis, and demonstrate its successful integration with our DEP (dielectrophoretic) particle transportation and active filter membrane technology. Two types of air-to-liquid interfaces were investigated. The first, consisted of a stationary meniscus with moving particles; and second, stationary particles with an oscillating liquid meniscus. Due to large interfacial forces required in penetrating the liquid meniscus, the first design performed inadequately. However, these roadblocks were eliminated in the second technique and demonstrated as a working system.

Additional Information

© 2000 IEEE. The funding for this project was provided by DARPA, MicroFlumes program under contract No. N66001-96-C-83632. The authors would like to thank Trevor Roper and Ellis Meng for their help.

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