Welcome to the new version of CaltechAUTHORS. Login is currently restricted to library staff. If you notice any issues, please email coda@library.caltech.edu
Published January 19, 2005 | Published
Book Section - Chapter Open

Lithographic nanofabrication of optical cavities


Lithographic control over nanostructures has recently evolved to an accuracy that permits the sub-wavelength manipulation of light within high refractive index semiconductors. We have used this lithographic control to fabricate two-dimensional photonic crystal cavities and micro-ring resonators. Here we will show the fabrication techniques utilized for the construction of High-Q nanocavities and, in particular, focus on the influence of present-day lithographic and etching procedures on the performance of the cavities. Applications of these optical cavities range from communications to chemical sensing and we will describe the effects of geometry on the different applications. We show the use of optical cavities for the miniaturization of optical spectroscopy systems with ultra-high spatial and spectral resolution.

Additional Information

© 2005 Society of Photo-Optical Instrumentation Engineers (SPIE). The authors gratefully acknowledge funding from the National Science Foundation, DARPA and the Air Force Office of Scientific Research

Attached Files

Published - 44.pdf


Files (345.6 kB)
Name Size Download all
345.6 kB Preview Download

Additional details

August 19, 2023
March 5, 2024