Welcome to the new version of CaltechAUTHORS. Login is currently restricted to library staff. If you notice any issues, please email coda@library.caltech.edu
Published January 2000 | Published
Book Section - Chapter Open

A normally closed in-channel micro check valve


We present here the first surface-micromachined, normally closed, in-channel, Parylene check valve. This device is fabricated monolithically on a silicon substrate using a five-layer Parylene process. The operating structure of the check valve is a circular sealing plate on top of a ring-shaped valve seat. The sealing plate is center-anchored on top of a chamber diaphragm that is vacuum-collapsed to the bottom of the chamber in order to achieve a normally closed position. A thin gold layer on the roughened valve seat surface is used to reduce stiction between the sealing plate and the valve seat. We have achieved an in-channel check valve with a cracking (opening) pressure of 20/spl sim/40 kPa under forward bias and no measurable leakage under reverse bias up to 270 kPa. Using this design, this valve performs well in two-phase microfluidic systems (i.e. microchannel flows containing gas, liquid, or gas/liquid mixture).

Additional Information

© 2000 IEEE. This project is funded by NIH grant 2 R01 RR06217-06. The authors would also like to thank Dr. Terry D. Lee from City of Hope Research Center for discussion and support.

Attached Files

Published - 00838492.pdf


Files (507.1 kB)
Name Size Download all
507.1 kB Preview Download

Additional details

August 19, 2023
October 20, 2023