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Published June 2007 | public
Journal Article

Soft Lithographic Fabrication of High Q Polymer Microcavity Arrays


As new synthetic, low-loss polymers are developed, polymer optical cavities are experiencing a revolution, in both fabrication design and functionality. Recently, a fabrication technique was developed that enabled planar arrays of polymeric resonators to achieve cavity Q factors greater than 1 million. In the present letter, this molding technique is expanded to fabricate resonators from polymers that have either thermal or UV curing mechanisms. The quality factors and broad band spectrum of these devices are determined at 680, 1300, and 1550 nm. These resonant cavities demonstrate quality factors which are competitive with photonic crystals and microdisk resonators.

Additional Information

© 2007 American Chemical Society. Received 9 April 2007. Published online 22 May 2007. Published in print 1 June 2007. A. M. Armani is supported by the Clare Boothe Luce Postdoctoral Fellowship. This work was supported by the DARPA Center for OptoFluidic Integration and the Lee Center at the California Institute of Technology.

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August 19, 2023
October 26, 2023