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Published January 2016 | public
Book Section - Chapter

Reliable deposition of ultra-thin parylene


This paper reports a novel and reliable process to prepare ultra-thin parylene film based on a principle combining both molecular effusion and diffusion. For the first time, a technique for the deposition of parylene film thinner than 20 nm in a highly controllable and repeatable way is developed. Parylene films with various thicknesses could also be prepared in a single deposition run by using this method. This technique holds promising potentials in extensive applications, such as protection/dielectric layer for needle electrodes and flexible electronics, semi-permeable membrane, and other polymer engineering.

Additional Information

© 2016 IEEE. Date Added to IEEE Xplore: 29 February 2016. The authors thank all the micromachining group members in Caltech. WW thanks the financial support from the scholarship from the China Scholarship Council and the Major State Basic Research Development Program (973 Program) (Grant No. 2015CB352100), the National Natural Science Foundation of China (Grant Nos. 81471750 and 91323304).

Additional details

August 20, 2023
January 13, 2024