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Published 2002 | public
Book Section - Chapter

Integrated Electrospray Chip for Mass Spectrometry


We report here a novel micromachined fluid dispensing system for ESI-MS (Electrospray Ionization - Mass Spectrometry) that has integrated electrolysis-based micro pump, micro mixer and ESI nozzle on a single chip. The whole structure is built by multi-layer Parylene surface micromachining technology. Using this system, precise and multi-sample dispensing for ESI-MS can be achieved on a single chip.

Additional Information

© 2002 Springer Science+Business Media Dordrecht. This work is supported in part by NSF (Grant No. EEC-9402726) and NIH (Grant No. 5R01 RR06217-10).

Additional details

August 21, 2023
October 18, 2023