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Published March 1993 | Published
Journal Article Open

Silicon micromachined waveguides for millimeter-wave and submillimeter-wave frequencies


The development of micromachining techniques to create silicon-based waveguide circuits, which can operate up to high submillimeter-wave frequencies, is reported. As a first step, a WR-10 waveguide has been fabricated from (110) silicon wafers. Insertion loss measurements on a gold-plated silicon waveguide show performance comparable to that of standard metal waveguides. It is suggested that active devices and planar circuits can be integrated with the waveguides, solving the traditional mounting problems.

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"© 1993 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE." Manuscript received October 5, 1992. This work was supported by the Strategic Defense Initiative Organization, Innovative Science and Technology Office, and the National Aeronautics and Space Administration, and the Caltech President's Fund. This work was carried out by the Jet Propulsion Laboratory, California Institute Technology.

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