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Published February 2016 | public
Journal Article

Micromachined silicon parallel acoustic delay lines as time-delayed ultrasound detector array for real-time photoacoustic tomography


This paper reports the development of a new 16-channel parallel acoustic delay line (PADL) array for real-time photoacoustic tomography (PAT). The PADLs were directly fabricated from single-crystalline silicon substrates using deep reactive ion etching. Compared with other acoustic delay lines (e.g., optical fibers), the micromachined silicon PADLs offer higher acoustic transmission efficiency, smaller form factor, easier assembly, and mass production capability. To demonstrate its real-time photoacoustic imaging capability, the silicon PADL array was interfaced with one single-element ultrasonic transducer followed by one channel of data acquisition electronics to receive 16 channels of photoacoustic signals simultaneously. A PAT image of an optically-absorbing target embedded in an optically-scattering phantom was reconstructed, which matched well with the actual size of the imaged target. Because the silicon PADL array allows a signal-to-channel reduction ratio of 16:1, it could significantly simplify the design and construction of ultrasonic receivers for real-time PAT.

Additional Information

© 2016 IOP Publishing Ltd. Received 25 September 2015, revised 13 November 2015, Accepted for publication 18 November 2015, Published 6 January 2016. Special issue on optoacoustic imaging and sensing. This work was supported in part by a grant (CMMI-1131758) from the National Science Foundation to J Zou and a grant (DP1 EB016986) from the National Institutes of Health to L V Wang has a financial interest in Microphotoacoustics, Inc. and in Endra, Inc., which, however, did not support this work.

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