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Published October 1967 | public
Journal Article

Conduction through TiO_2 thin films with large ionic space charge


The electrical properties are described for thin film sandwiches of Al-TiO_2-Al with films varying in thickness from 100 to 410 Å. The results are interpreted in terms of a large ionic space charge in the TiO_2 films. By selecting a sample of appropriate thickness, it was possible to make a detailed comparison of the. experimental results with the theory of the preceding paper. Using the barrier energies at the two electrodes determined independently from photoelectric measurements and adjusting a single parameter, the characteristic temperature T_0 to the results, we obtain good agreement for the dependence of both current and capacitance on voltage and temperature. From the value of T_0 so determined we calculate a maximum ionic space-charge density adjacent to the electrode interfaces of approximately 5 mole per cent which conforms with typical values of saturation concentrations of impurities quoted for TiO_2. The dependence of conductance and capacitance on frequency is also considered and shown to be in qualitative agreement with the theoretical model.

Additional Information

Copyright © 1967 Pergamon Press. Receiwed 17 November 1966. Much of this work was presented at the IEEE Solid State Research Conference, Northwestern University, Evanston, Illinois. The portion of this work was performed at the Jet Propulsion Laboratory was supported by the National Aeronautics and Space Administration, under Contract Number NAS 7-100.

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