Published May 2018 | Version Supplemental Material + Submitted
Journal Article Open

Bridging ultrahigh-Q devices and photonic circuits

Abstract

Optical microresonators are essential to a broad range of technologies and scientific disciplines. However, many of their applications rely on discrete devices to attain challenging combinations of ultra-low-loss performance (ultrahigh Q) and resonator design requirements. This prevents access to scalable fabrication methods for photonic integration and lithographic feature control. Indeed, finding a microfabrication bridge that connects ultrahigh-Q device functions with photonic circuits is a priority of the microcavity field. Here, an integrated resonator having a record Q factor over 200 million is presented. Its ultra-low-loss and flexible cavity design brings performance to integrated systems that has been the exclusive domain of discrete silica and crystalline microcavity devices. Two distinctly different devices are demonstrated: soliton sources with electronic repetition rates and high-coherence/low-threshold Brillouin lasers. This multi-device capability and performance from a single integrated cavity platform represents a critical advance for future photonic circuits and systems.

Additional Information

© 2018 Macmillan Publishers Limited, part of Springer Nature. Received: 10 September 2017; Accepted: 12 February 2018; Published online: 19 March 2018. Data availability: The data that support the plots within this paper and other findings of this study are available from the corresponding author upon reasonable request. We thank O. Painter and B. Baker for assistance with the PECVD silicon nitride process, H. Atwater and W.-H. Cheng for assistance with silica atomic layer deposition, M. Hunt for assistance with electron-beam microscopy, Y.-H. Lai for technical assistance, and A. Matsko and J. Bowers for helpful discussions. We also gratefully acknowledge the Defense Advanced Research Projects Agency under the DODOS (award no. HR0011-15-C-0055, sub award KK1540) and PRIGM:AIMS (grant no. N66001-16-1-4046) programs and the Kavli Nanoscience Institute. Author Contributions: K.Y.Y., D.Y.O., S.H.L. and K.V. conceived the fabrication process and resonator design. K.Y.Y., D.Y.O. and S.H.L. fabricated and tested the resonator structures with assistance from B.S. and H.W. K.Y.Y., D.Y.O., S.H.L., Q.F.Y., X.Y., B.S. and H.W. conducted soliton and Brillouin laser measurements. All authors analysed the data and contributed to writing the manuscript. The authors declare no competing interests.

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Supplemental Material - 41566_2018_132_MOESM1_ESM.pdf

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Additional details

Additional titles

Alternative title
Integrated Ultra-High-Q Optical Resonator
Alternative title
Bridging ultra-high-Q devices and photonic circuits

Identifiers

Eprint ID
78326
DOI
10.1038/s41566-018-0132-5
Resolver ID
CaltechAUTHORS:20170619-095450945

Related works

Funding

Defense Advanced Research Projects Agency (DARPA)
HR0011-15-C-0055
Office of Naval Research (ONR)
N66001-16-1-4046
Kavli Nanoscience Institute

Dates

Created
2017-06-19
Created from EPrint's datestamp field
Updated
2021-11-15
Created from EPrint's last_modified field

Caltech Custom Metadata

Caltech groups
Kavli Nanoscience Institute