Published June 1973 | Version public
Journal Article Open

Channel Optical Waveguides and Directional Couplers in GaAs -- Imbedded and Ridged

Abstract

The development of useful integrated-optics circuits requires channel waveguides of small dimensions fabricated with close tolerances. We shall discuss techniques for forming smooth channel guides in semiconductors such as GaAs, with dimensions of the order of a few microns and show their application to directional couplers.

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© Copyright 1973 IEEE. Reprinted with permission.

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9823
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CaltechAUTHORS:SOMieeejqe73

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2008-03-19
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2019-10-03
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