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Published September 28, 2009 | Published
Journal Article Open

Frequency tunable near-infrared metamaterials based on VO₂ phase transition


Engineering metamaterials with tunable resonances from mid-infrared to near-infrared wavelengths could have far-reaching consequences for chip based optical devices, active filters, modulators, and sensors. Utilizing the metal-insulator phase transition in vanadium oxide (VO₂), we demonstrate frequency-tunable metamaterials in the near-IR range, from 1.5 - 5 microns. Arrays of Ag split ring resonators (SRRs) are patterned with e-beam lithography onto planar VO₂ and etched via reactive ion etching to yield Ag/VO₂ hybrid SRRs. FTIR reflection data and FDTD simulation results show the resonant peak position red shifts upon heating above the phase transition temperature. We also show that, by including coupling elements in the design of these hybrid Ag/VO₂ bi-layer structures, we can achieve resonant peak position tuning of up to 110 nm.

Additional Information

© 2009 Optical Society of America. Original Manuscript: August 11, 2009. Manuscript Accepted: September 18, 2009. Revised Manuscript: September 17, 2009. Published: September 25, 2009. We acknowledge financial support from the National Science Foundation under Grant DMR 0606472, and the Army Research Office; portions of this work were performed in facilities sponsored by the Center for Science and Engineering of Materials, and NSF MRSEC. We gratefully acknowledge critical support and infrastructure provided for this work by the Kavli Nanoscience Institute at Caltech. I. M. P. acknowledges the support of a National Science Foundation Graduate Fellowship. We also gratefully acknowledge the help of Professor George Rossman for IR facilities and measurements.

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August 19, 2023
October 19, 2023