Supplemental Document
AlSb as a material for high index contrast
nanophotonics: supplement
H
ALEY
C. B
AUSER
, D
AVID
R. N
EEDELL
,
AND
H
ARRY
A.
A
TWATER
∗
Department of Applied Physics and Materials Science, California Institute of Technology, 1200 E
California Blvd, Pasadena, CA 91125, USA
∗
haa@caltech.edu
This supplement published with The Optical Society on 2 April 2021 by The Authors under the
terms of the Creative Commons Attribution 4.0 License in the format provided by the authors
and unedited. Further distribution of this work must maintain attribution to the author(s) and the
published article’s title, journal citation, and DOI.
Supplement DOI: https://doi.org/10.6084/m9.figshare.14216990
Parent Article DOI: https://doi.org/10.1364/OME.422163
AlSb
Nano
H
ALEY
C
1
Departme
n
CA 91125,
U
*haa@calt
e
as a M
a
photon
C
.
B
AUSER
,
n
t of Applied Ph
y
U
SA
e
ch.edu
Figure 1: Cr
provided in
S
u
a
terial f
ics
D
AVID
R.
N
y
sics and Mater
i
oss-sectional SE
Fig. 4
u
pporti
n
or Hig
h
EEDELL
,
A
N
i
als Science, Ca
l
M of the thin fil
n
g Info
r
h
Index
C
D
H
ARRY
A.
l
ifornia Institut
e
m of AlSb corre
s
r
mation
Contra
s
.
A
TWATER
*
e
of Technology,
s
ponding to the
s
t
*
1200 E Califor
n
ellipsometry d
a
n
ia Blvd, Pasad
e
a
ta
e
na,
Figure 3: SE
graininess
o
film after b
e
M images of th
e
o
f the thin film
w
e
ing left to com
p
Figure 2: AFM
oxidation.
e
AlSb film corre
w
ith minimal ox
y
p
letely oxidize.
image demons
t
sponding to th
e
y
gen exposure, l
e
t
rating grain siz
e
e
ellipsometry d
a
e
ading to only
p
e
of thin film of
a
ta in Fig. 4. Th
e
p
artial oxidation
.
AlSb after und
e
e
image on the l
e
. The right imag
e
e
rgoing partial
e
ft shows the
e
shows the sa
m
m
e thin