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Published October 2000 | Published
Journal Article Open

Design and Fabrication of Silicon Photonic Crystal Optical Waveguides


We have designed and fabricated waveguides that incorporate two-dimensional (2-D) photonic crystal geometry for lateral confinement of light, and total internal reflection for vertical confinement. Both square and triangular photonic crystal lattices were analyzed. A three-dimensional (3-D) finite-difference time-domain (FDTD) analysis was used to find design parameters of the photonic crystal and to calculate dispersion relations for the guided modes in the waveguide structure. We have developed a new fabrication technique to define these waveguides into silicon-on-insulator material. The waveguides are suspended in air in order to improve confinement in the vertical direction and symmetry properties of the structure. High-resolution fabrication allowed us to include different types of bends and optical cavities within the waveguides.

Additional Information

© 2000 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE." Manuscript received December 23, 1999; revised June 28, 2000. This work was supported in part by the AFOSR under Contract AFS-49620-98-1-01447. The authors gratefully acknowledge many fruitful discussions with O. Painter, R. Lee, and Prof. A. Yariv from Caltech, Pasadena, CA, and D. Nedeljkovic and T. P. Pearsall from Corning, Inc., (France). The authors also wish to thank Prof. Yariv for making his laboratory and polishing and cleaving equipment available to them to conduct these experiments.

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