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Published August 1, 1983 | public
Journal Article Open

High-speed GaAlAs/GaAs p-i-n photodiode on a semi-insulating GaAs substrate


A high-speed, high-responsivity GaAlAs/GaAs p-i-n photodiode has been fabricated on a GaAs semi-insulating substrate. The 75-µm-diam photodiode has a 3-dB bandwidth of 2.5 GHz and responsivity of 0.45 A/W at 8400 Å (external quantum efficiency of 65%). The diode is suitable for monolithic integration with other optoelectronic devices.

Additional Information

Copyright © 1983 American Institute of Physics. (Received 1 March 1983; accepted for publication 29 April 1983) This research was supported by the Defense Advanced Research Project Agency.


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