Computational aberration correction of VIS-NIR multispectral imaging microscopy based on Fourier ptychography
Due to the chromatic dispersion properties inherent in all optical materials, even the best-designed multispectral objective will exhibit residual chromatic aberration. Here, we demonstrate a multispectral microscope with a computational scheme based on the Fourier ptychographic microscopy (FPM) to correct these effects in order to render undistorted, in-focus images. The microscope consists of 4 spectral channels ranging from 405 nm to 1552 nm. After the computational aberration correction, it can achieve isotropic resolution enhancement as verified with the Siemens star sample. We image a flip-chip to show the promise of our system to conduct fault detection on silicon chips. This computational approach provides a cost-efficient strategy for high quality multispectral imaging over a broad spectral range.
© 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement. Received 4 Jun 2019; revised 2 Aug 2019; accepted 5 Aug 2019; published 19 Aug 2019. Funding: California Institute of Technology (Caltech Innovation Initiative (CII): 25570015). We thank Hangwen Lu and Xiaoyu Liu for their initial efforts to this project, Ruizhi Cao for his constructive discussion and the generous help from Michelle Cua and Craig Ives.
Published - oe-27-18-24923.pdf