Cathodoluminescence system for a scanning electron microscope using an optical fiber for light collection
We describe a novel light collection system for cathodoluminescence scanning electron microscopy. Cathodoluminescence emitted from the sample surface enters directly into the facet of an optical fiber, which is held less than a millimeter away from the sample to optimize the collection efficiency. The fiber is small enough that it has a minimal effect on access to the sample by other detection apparatus. Three axis positioning of the fiber is accomplished with motorized translation stages located in the sample chamber. Techniques for generating cathodoluminescence images and local spectra are discussed. The techniques are applied to oval defects in molecular beam epitaxially grown GaAs/AlGaAs epilayers, and the results are presented.
Additional InformationCopyright © 1989 American Institute of Physics. Received 20 May 1988; accepted 20 October 1988. The authors would like to express their appreciation to Hadis Morkoç and Lars Eng for many helpful discussions. We would also like to thank Larry Begay for his skillful machining of the fiber mount and adapter plates. This work was supported by the Office of Naval Research, the JPL SDIO-ISTC, and Caltech's Program in Advanced Technologies, sponsored by Aerojet General, General Motors, and TRW.
Published - HOErsi89.pdf