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Published June 2015 | public
Book Section - Chapter

Study of Parylene penetration into microchannel


This study reports the penetration properties of various Parylenes (i.e., C, N and HT) inside long microchannels. The work broadly covers the effects of the dimer type, loaded dimer mass, substrate temperature and channel size on the penetration length, i.e., the length that Parylene can be deposited into the microchannel from the inlet. Understanding the mechanism of Parylene penetration into microchannel helps to develop mass-producible inner surface protection design and process for microfluidic devices.

Additional Information

© 2015 IEEE. The authors thank all the micromachining group members in Caltech. WW thanks the financial support from the scholarship from the China Scholarship Council and the Major State Basic Research Development Program (973 Program) (Grant Nos. 2011CB309502 and 2015CB352100), the National Natural Science Foundation of China (Grant Nos. 81471750 and 91323304), the 985-III program (clinical applications), and the Seeding Grant for Medicine and Information Sciences (2014-MI-04) of Peking University.

Additional details

September 15, 2023
October 23, 2023