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Published January 2008 | Published
Book Section - Chapter Open

Parylene-HT-based electret rotor generator


A new micro power generator with parylene HT electret rotor is made. This generator uses parylene HT as a new electret material with a much superior charge density compared to teflon and CYTOP. The highest surface potential observed is 204.58 V/mum, equivalent to a surface charge density of 3.69 mC/m^2. The generator uses an electret rotor. The rotor is a piece of PEEK insulator block coated with a layer of corona-charged parylene HT. Both output electrodes are on the stator. The generator produces 17.98 µW with 80MΩ load at 50Hz and 7.77 µW with an 800MΩ load at 10Hz.

Additional Information

© 2008 IEEE. The authors thank all members from Caltech Micromaching Laboratory for their assistance on design, fabrication and testing of this device.

Attached Files

Published - Lo2008p8650Mems_2008_21St_Ieee_International_Conference_On_Micro_Electro_Mechanical_Systems_Technical_Digest.pdf



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