Enhancing the dynamic range of deformable mirrors with compression bias

Creators: Cao, Huy Tuong; Ng, Sebastian W. S.; Noh, Minkyun; Brooks, Aidan; Matichard, Fabrice; Veitch, Peter J.

Abstract

We report the design and testing of a compression-biased thermally-actuated deformable mirror that has a dynamic range larger than the limit imposed by pure-bending stress, negligible higher-order-mode scattering, and a linear defocus response and that is vacuum compatible. The optimum design principles for this class of actuator are described and a mirror with 370 mD dynamic range is demonstrated.

Additional Information

© 2020 Optical Society of America under the terms of the OSA Open Access Publishing Agreement. Received 2 Sep 2020; revised 25 Nov 2020; accepted 27 Nov 2020; published 7 Dec 2020. This research was conducted jointly with the support of the Australian Research Council Centre of Excellence for Gravitational Wave Discovery and the National Science Foundation under the LIGO cooperative agreement. Funding. Australian Research Council (CE170100004); National Science Foundation (PHY-0757058). The authors declare no conflicts of interest.

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