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Published January 2007 | Published
Book Section - Chapter Open

A simple micro electret power generator


We developed a novel, yet simple, micro electret power generator prototype for low-frequency energy harvesting applications. In this prototype, two electrodes of the power generator are placed on the stator. The rotor is only a plate with metal strips of half of the spatial frequency of the stator plate. The packaging is to simply fix the stator to a container and put the rotor directly on top of the stator. CYTOP, a MEMS-compatible perfluoropolymer, served as the electret material and charged with corona charging. The power output was 2.267μW at 60Hz.

Additional Information

© 2007 IEEE. The authors would like to thank Mr. Trevor Roper for his assistance with equipment and fabrication, and Bionic Harvest Co., Ltd. for corona charging facilities. We would also thank Tanya Owen, Christine Matsuki and other members of the Caltech Micromachining Laboratory for their assistance. This work is supported partially by DARPA (Award #0205-6-CE123).

Attached Files

Published - Lo2007p8689Proceedings_Of_The_Ieee_Twentieth_Annual_International_Conference_On_Micro_Electro_Mechanical_Systems_Vols_1_And_2.pdf



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