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Published March 1990 | public
Journal Article

Particle generation in a chemical vapor deposition process with seed particles


The formation of aerosol particles by gas-phase chemical reaction in the presence of seed particles has been studied experimentally and theoretically. Titanium tetraisopropoxide (TTIP) vapor containing ultrafine TiO₂ seed particles was introduced into a laminar flow aerosol reactor, and the properties of produced TiO₂ aerosol were measured. By comparing the particle numbers and size distributions of the resulting aerosol with those of the seed particles and those of homogeneously nucleated particles in the absence of seed particles, the effects of initial concentrations of TTIP vapor, reaction temperatures, and properties of seed particles on the suppression of homogeneous nucleation were experimentally clarified. In the theoretical analysis, the population balance equation expressing simultaneous generation of TiO₂ monomer, Brownian coagulation and diffusive deposition of TiO₂ monomer and aerosols was solved. The observed suppression of homogeneous nucleation by the seed particles is explained qualitatively by the theoretical analysis.

Additional Information

This work was supported by Japan Grant in Aid for Scientific Research No. 60750876.

Additional details

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October 25, 2023