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Published October 2011 | public
Book Section - Chapter

Ultra-low-loss whispering gallery delay lines and resonators on a silicon chip


Using a wet etch process, 7 meter long waveguides having optical loss of 0.055dB/m are demonstrated. The same process produces resonators having Q factors as high as 750 million. Applications to microwave photonics are reviewed.

Additional Information

© 2011 IEEE. Date of Current Version: 22 December 2011. This work was supported by DARPA.

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October 17, 2023