A thermopneumatic microfluidic system
A self-contained planar microfluidic system using thermopneumatic actuation has been demonstrated. Using a novel suspended silicon island heater fabricated by deep reactive ion etching (DRIE), and a precision machined acrylic fluidic substrate with a matching silicone rubber membrane, a self-contained system of channels, valves, and a pump has been demonstrated using air as a working fluid.
Additional Information© 2002 IEEE. This work is supported by DARPA/MTO MicroFlumes Program under Naval Ocean Systems Center Contract N66001-96-8632 and the NSF Center for Neuromorphic System Engineering at Caltech.
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