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Published January 2004 | Published
Book Section - Chapter Open

Uncooled all-parylene bolometer


This paper presents an uncooled, room-temperature, all-parylene bolometer. The device is made of two layers of pyrolyzed (or "carbonized") parylene and a metal layer for interconnections. We demonstrated that high responsivity can be achieved by tailoring the electrical conductivity and the temperature coefficient of resistance (TCR) using different pyrolysis conditions for each parylene layer.

Additional Information

© 2004 IEEE. This work was supported by the NSF Center for Neuromorphic Engineering (CNSE) at Caltech. The authors would like to thank Trevor Roper, Tanya Owen and Ted Harder for their assistance.

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