Published January 2004
| Published
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Uncooled all-parylene bolometer
- Creators
- Liger, Matthieu
- Konishi, Satoshi
-
Tai, Yu-Chong
Abstract
This paper presents an uncooled, room-temperature, all-parylene bolometer. The device is made of two layers of pyrolyzed (or "carbonized") parylene and a metal layer for interconnections. We demonstrated that high responsivity can be achieved by tailoring the electrical conductivity and the temperature coefficient of resistance (TCR) using different pyrolysis conditions for each parylene layer.
Additional Information
© 2004 IEEE. This work was supported by the NSF Center for Neuromorphic Engineering (CNSE) at Caltech. The authors would like to thank Trevor Roper, Tanya Owen and Ted Harder for their assistance.Attached Files
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Additional details
- Eprint ID
- 95152
- Resolver ID
- CaltechAUTHORS:20190501-154134168
- NSF
- Center for Neuromorphic Systems Engineering, Caltech
- Created
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2019-05-01Created from EPrint's datestamp field
- Updated
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2021-11-16Created from EPrint's last_modified field