Disordering of InGaAs/GaAs strained quantum well structures induced by rare gas ion implantation
In this work we have investigated the effect of various implantation schemes on In(0.2)GaAs/GaAs/AlGaAs Single Quantum Well, where the implanted species are Argon and Helium, with doses in the range 1E12 to 1E14 at cm^2, at energy spanning 270 - 400 KeV and 30 to 50 KeV for Ar and He, respectively. Repetitive annealing processes were carried out between 735 and 870 degree(s)C and the interdiffusion was deduced by photoluminescence measurements. A maximum of 20 nm shift from He ion implanted Quantum Well with an high degree of reconstruction has been recorded, thus allowing the application of this disordering scheme for the realization of optoelectronic devices.
© 1994 Society of Photo-Optical Instrumentation Engineers (SPIE). We are deeply indebt to Dr. C. Frigeri, MASPEC Parma, for TEN measurements and to Dr. A. DiPaola for continuous help during the work.
Published - 38.pdf