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Published January 2003 | Published
Book Section - Chapter Open

Micro electret power generator


We present the first micromachined rotational electret power generator, linearized theoretical model of electret power generation, and novel method to produce uniformly charged electret. We also improved our previously developed [1, 2] thin film Teflon AF 1601-S electret technology with respect to dielectric thickness, charge uniformity, and processability. In demonstration, our prototype power generator successfully generated > 25μW with electret thickness of 9μm, effective charge density of -2.8 x l0^-4 C/m^2, and rotational speed of 4170 RPM.

Additional Information

© 2003 IEEE. Reprinted with permission. Publication Date: 19-23 January 2003. Date Published in Issue: 2003-04-02.

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