Portable optical microscope-on-a-chip
In this paper, we present a novel high resolution optical imaging device on chip. It is based on a line of nano holes defined in an optically opaque aluminum film on a CMOS imaging sensor chip. Because it's free of bulky optical elements and compatible to the planar micro fabrication process, it is very promising to become an important component for the on-chip high resolution imaging in the future. The fabrication and operation of this novel on-chip microscope is explained in details. The performance is evaluated theoretically and is verified experimentally by examining the profile of a laser spot formed by a 10X objective lens.
Additional Information© 2006 Society of Photo-Optical Instrumentation Engineers (SPIE). We are grateful for the generous help from Professor Axel Scherer, Dr. Joerg Schilling, Professor Ali Hajimiri and Yu-Jiu Wang in fabrication. The assistance from Caltech Watson cleanroom is well appreciated. This project is funded by DARPA's center for optofluidic integration.
Published - 609509.pdf