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Published November 1995 | public
Book Section - Chapter



The general development of electrostatic and magnetostatic micromotors is discussed. Electrostatic micromotors already have many useful applications and will continue to flourish. On the other hand, magnetostatic micromotors are emerging as fabrication technologies are developing. The advantages of larger forces and longer working distances are especially promising.

Additional Information

© 1995 IEEE. Date of Current Version: 06 August 2002. First, the author would like to thank his graduate students Chang Liu, Ton Tsao, Raanan Miller and Amish Desai for their technical contributions. In addition, he is grateful to Drs. Chihming Ho, Denny Miu and Weilong Tang for their involvement in various projects. Finally, great appreciation is to Drs. Jim McMichael (AFOSR) and Ken Gabriel (ARPA) for their support of the projects.

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