Published April 16, 2007 | Version Published
Journal Article Open

An optical fiber-taper probe for wafer-scale microphotonic device characterization

Abstract

A small depression is created in a straight optical fiber taper to form a local probe suitable for studying closely spaced, planar microphotonic devices. The tension of the "dimpled" taper controls the probe-sample interaction length and the level of noise present during coupling measurements. Practical demonstrations with high-Q silicon microcavities include testing a dense array of undercut microdisks (maximum Q = 3.3×10^6) and a planar microring (Q = 4.8×10^6).

Additional Information

© 2007 Optical Society of America Received 9 Feb 2007; revised 15 Mar 2007; accepted 19 Mar 2007; published 4 Apr 2007 We thank M. D. Henry, K. Srinivasan, and K. Hennessy for fabrication assistance and M. Hochberg and A. Scherer for the SOI wafer used to fabricate the planar microring sample. This work was supported by the DARPA EPIC program, contract number HR0011-04-1-0054. For graduate fellowship support, we thank the Moore Foundation (CPM and MB), NSF (CPM), NPSC (MB), and HRL Laboratories (MB).

Attached Files

Published - MICoe07.pdf

Files

MICoe07.pdf

Files (3.1 MB)

Name Size Download all
md5:2f3434d970f11667d1e04b9da979d598
3.1 MB Preview Download

Additional details

Identifiers

Eprint ID
8160
Resolver ID
CaltechAUTHORS:MICoe07

Funding

Defense Advanced Research Projects Agency (DARPA)
HR0011-04-1-0054
Gordon and Betty Moore Foundation
NSF
National Physical Science Consortium
Hughes Research Laboratories

Dates

Created
2007-07-31
Created from EPrint's datestamp field
Updated
2019-10-02
Created from EPrint's last_modified field